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Research on Confocal and Co-Phasing Adjustments of Optical Mirrors by a Six-DOF Cross-Scale Piezoelectric Platform

Qingbing Chang, Yingxiang Liu, Weishan Chen, Jie Deng 0001, Shijing Zhang. Research on Confocal and Co-Phasing Adjustments of Optical Mirrors by a Six-DOF Cross-Scale Piezoelectric Platform. IEEE Transactions on Industrial Electronics, 71(11):14590-14599, November 2024. [doi]

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