Kuo-Chi Chang, Jeng-Shyang Pan, Kai-Chun Chu, Der-Juinn Horng, Huang Jing. Study on Information and Integrated of MES Big Data and Semiconductor Process Furnace Automation. In Jeng-Shyang Pan, Jerry Chun-Wei Lin, Bixia Sui, Shih-Pang Tseng, editors, Genetic and Evolutionary Computing - Proceedings of the Twelfth International Conference on Genetic and Evolutionary Computing, ICGEC 2018, Changzhou, China, December 14-17, 2018. Volume 834 of Advances in Intelligent Systems and Computing, pages 669-678, Springer, 2018. [doi]
@inproceedings{ChangPCHJ18,
title = {Study on Information and Integrated of MES Big Data and Semiconductor Process Furnace Automation},
author = {Kuo-Chi Chang and Jeng-Shyang Pan and Kai-Chun Chu and Der-Juinn Horng and Huang Jing},
year = {2018},
doi = {10.1007/978-981-13-5841-8_70},
url = {https://doi.org/10.1007/978-981-13-5841-8_70},
researchr = {https://researchr.org/publication/ChangPCHJ18},
cites = {0},
citedby = {0},
pages = {669-678},
booktitle = {Genetic and Evolutionary Computing - Proceedings of the Twelfth International Conference on Genetic and Evolutionary Computing, ICGEC 2018, Changzhou, China, December 14-17, 2018},
editor = {Jeng-Shyang Pan and Jerry Chun-Wei Lin and Bixia Sui and Shih-Pang Tseng},
volume = {834},
series = {Advances in Intelligent Systems and Computing},
publisher = {Springer},
isbn = {978-981-13-5841-8},
}