Kuo-Chi Chang, Jeng-Shyang Pan, Kai-Chun Chu, Der-Juinn Horng, Huang Jing. Study on Information and Integrated of MES Big Data and Semiconductor Process Furnace Automation. In Jeng-Shyang Pan, Jerry Chun-Wei Lin, Bixia Sui, Shih-Pang Tseng, editors, Genetic and Evolutionary Computing - Proceedings of the Twelfth International Conference on Genetic and Evolutionary Computing, ICGEC 2018, Changzhou, China, December 14-17, 2018. Volume 834 of Advances in Intelligent Systems and Computing, pages 669-678, Springer, 2018. [doi]
Abstract is missing.