Chun-Ming Chang, Ming-Hua Shiao, Donyau Chiang, Mao-Jung Huang, Chin-Tien Yang, Wen-Jeng Hsueh. Surface property study of different patterning sapphire structures by ICP-RIE. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 372-375, IEEE, 2013. [doi]
@inproceedings{ChangSCHYH13,
title = {Surface property study of different patterning sapphire structures by ICP-RIE},
author = {Chun-Ming Chang and Ming-Hua Shiao and Donyau Chiang and Mao-Jung Huang and Chin-Tien Yang and Wen-Jeng Hsueh},
year = {2013},
doi = {10.1109/NEMS.2013.6559754},
url = {http://dx.doi.org/10.1109/NEMS.2013.6559754},
researchr = {https://researchr.org/publication/ChangSCHYH13},
cites = {0},
citedby = {0},
pages = {372-375},
booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
publisher = {IEEE},
}