Pen-Lun Chang, Shun-Wu Wang, Meng-Ju Lin. Deformation Analysis of Tunable Fabry-Perot Structure Caused by Thermal Residual Gradient Stresses. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 61-64, IEEE Computer Society, 2005. [doi]
Abstract is missing.