Kuo-Chi Chang, Yu-Wen Zhou, Hsiao-Chuan Wang, Yuh-Chung Lin, Kai-Chun Chu, Tsui-Lien Hsu, Jeng-Shyang Pan 0001. Study of PSO Optimized BP Neural Network and Smith Predictor for MOCVD Temperature Control in 7 nm 5G Chip Process. In Aboul Ella Hassanien, Adam Slowik, Václav Snásel, Hisham El-Deeb, Fahmy M. Tolba, editors, Proceedings of the International Conference on Advanced Intelligent Systems and Informatics, AISI 2020, Cairo, Egypt, 19-21 October 2020. Volume 1261 of Advances in Intelligent Systems and Computing, pages 568-576, Springer, 2020. [doi]
@inproceedings{ChangZWLCH020,
title = {Study of PSO Optimized BP Neural Network and Smith Predictor for MOCVD Temperature Control in 7 nm 5G Chip Process},
author = {Kuo-Chi Chang and Yu-Wen Zhou and Hsiao-Chuan Wang and Yuh-Chung Lin and Kai-Chun Chu and Tsui-Lien Hsu and Jeng-Shyang Pan 0001},
year = {2020},
doi = {10.1007/978-3-030-58669-0_51},
url = {https://doi.org/10.1007/978-3-030-58669-0_51},
researchr = {https://researchr.org/publication/ChangZWLCH020},
cites = {0},
citedby = {0},
pages = {568-576},
booktitle = {Proceedings of the International Conference on Advanced Intelligent Systems and Informatics, AISI 2020, Cairo, Egypt, 19-21 October 2020},
editor = {Aboul Ella Hassanien and Adam Slowik and Václav Snásel and Hisham El-Deeb and Fahmy M. Tolba},
volume = {1261},
series = {Advances in Intelligent Systems and Computing},
publisher = {Springer},
isbn = {978-3-030-58669-0},
}