Kuo-Chi Chang, Yu-Wen Zhou, Hsiao-Chuan Wang, Yuh-Chung Lin, Kai-Chun Chu, Tsui-Lien Hsu, Jeng-Shyang Pan 0001. Study of PSO Optimized BP Neural Network and Smith Predictor for MOCVD Temperature Control in 7 nm 5G Chip Process. In Aboul Ella Hassanien, Adam Slowik, Václav Snásel, Hisham El-Deeb, Fahmy M. Tolba, editors, Proceedings of the International Conference on Advanced Intelligent Systems and Informatics, AISI 2020, Cairo, Egypt, 19-21 October 2020. Volume 1261 of Advances in Intelligent Systems and Computing, pages 568-576, Springer, 2020. [doi]
Abstract is missing.