Lu-Ping Chao, Chih-Wei Lin, Yung-Dong Lau. A Study on the Effects of Humidity, Temperature, and Pressure Sensor on the Piezoresistive Film Co-Structure. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 443-447, IEEE Computer Society, 2005. [doi]
Abstract is missing.