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Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices

R. Charavel, J. Roig, S. Mouhoubi, P. Gassot, F. Bauwens, P. Vanmeerbeek, B. Desoete, P. Moens, Eddy De Backer. Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices. Microelectronics Reliability, 50(9-11):1758-1762, 2010. [doi]

Authors

R. Charavel

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J. Roig

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S. Mouhoubi

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P. Gassot

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F. Bauwens

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P. Vanmeerbeek

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B. Desoete

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P. Moens

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Eddy De Backer

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