A. Ray Chaudhuri, S. Severi, P. Helin, L. A. Francis, H. A. C. Tilmans. Challenges of monolithic integration for SiGe MEMS technology. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]
Abstract is missing.