High precision control for piezo-actuated XY-table

Xinkai Chen. High precision control for piezo-actuated XY-table. In 2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012, Guangzhou, China, December 11-14, 2012. pages 2381-2386, IEEE, 2012. [doi]

@inproceedings{Chen12-75,
  title = {High precision control for piezo-actuated XY-table},
  author = {Xinkai Chen},
  year = {2012},
  doi = {10.1109/ROBIO.2012.6491326},
  url = {http://dx.doi.org/10.1109/ROBIO.2012.6491326},
  researchr = {https://researchr.org/publication/Chen12-75},
  cites = {0},
  citedby = {0},
  pages = {2381-2386},
  booktitle = {2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012, Guangzhou, China, December 11-14, 2012},
  publisher = {IEEE},
  isbn = {978-1-4673-2125-9},
}