A Light-Weighted CNN Model for Wafer Structural Defect Detection

Xiaoyan Chen, Jianyong Chen, Xiaoguang Han, Chundong Zhao, Dongyang Zhang, Kuifeng Zhu, Yanjie Su. A Light-Weighted CNN Model for Wafer Structural Defect Detection. IEEE Access, 8:24006-24018, 2020. [doi]

Abstract

Abstract is missing.