Rapid thermal annealing for carbon nanotube thin film transistors by a double-themral-region furnace

Chun Chen, Yanyan Deng, Peijian He, Min Zhang. Rapid thermal annealing for carbon nanotube thin film transistors by a double-themral-region furnace. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 545-548, IEEE, 2016. [doi]

Authors

Chun Chen

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Yanyan Deng

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Peijian He

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Min Zhang

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