Chun Chen, Yanyan Deng, Peijian He, Min Zhang. Rapid thermal annealing for carbon nanotube thin film transistors by a double-themral-region furnace. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 545-548, IEEE, 2016. [doi]
@inproceedings{ChenDHZ16,
title = {Rapid thermal annealing for carbon nanotube thin film transistors by a double-themral-region furnace},
author = {Chun Chen and Yanyan Deng and Peijian He and Min Zhang},
year = {2016},
doi = {10.1109/NEMS.2016.7758310},
url = {https://doi.org/10.1109/NEMS.2016.7758310},
researchr = {https://researchr.org/publication/ChenDHZ16},
cites = {0},
citedby = {0},
pages = {545-548},
booktitle = {11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016},
publisher = {IEEE},
isbn = {978-1-5090-1947-2},
}