An effective system for parameter optimization in photolithography process of a LGP stamper

Wen-Chin Chen, Xiao-Yun Jiang, Hui-Pin Chang, Hisa-Ping Chen. An effective system for parameter optimization in photolithography process of a LGP stamper. Neural Computing and Applications, 24(6):1391-1401, 2014. [doi]

Abstract

Abstract is missing.