Development of a capacitive sensing technology for the measurement of perpendicularity in the narrow, deep slot-walls of micromolds

Shun-Tong Chen, Sheng-Min Lin. Development of a capacitive sensing technology for the measurement of perpendicularity in the narrow, deep slot-walls of micromolds. Microelectronics Reliability, 83:216-222, 2018. [doi]

Abstract

Abstract is missing.