Yu-Chen Chen, Sung-Cheng Lo, Hsu-Hsiang Cheng, Mingching Wu, I-Yu Huang, Weileun Fang. Design of Cantilever Diaphragm Array Piezoelectric MEMS Microphone for Signal-To-Noise Ratio Enhancement. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]
Abstract is missing.