Simulation and parameter optimizing of multi-electrode capacitive transducers based on finite element method

Deyun Chen, Mouzun Li, Haoyang Liu. Simulation and parameter optimizing of multi-electrode capacitive transducers based on finite element method. In Reiner Eschbach, Gabriel G. Marcu, editors, Color Imaging XI: Processing, Hardcopy, and Applications, San Jose, CA, USA, January 15, 2006. Volume 6058 of SPIE Proceedings, pages 605814, SPIE, 2006. [doi]

Abstract

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