Metal defect localization of GaAs or Si based ICs by dynamic emission microscopy

Xuanlong Chen, Liyuan Liu, Enliang Li. Metal defect localization of GaAs or Si based ICs by dynamic emission microscopy. Microelectronics Reliability, 72:24-29, 2017. [doi]

Authors

Xuanlong Chen

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Liyuan Liu

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Enliang Li

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