Metal defect localization of GaAs or Si based ICs by dynamic emission microscopy

Xuanlong Chen, Liyuan Liu, Enliang Li. Metal defect localization of GaAs or Si based ICs by dynamic emission microscopy. Microelectronics Reliability, 72:24-29, 2017. [doi]

@article{ChenLL17-6,
  title = {Metal defect localization of GaAs or Si based ICs by dynamic emission microscopy},
  author = {Xuanlong Chen and Liyuan Liu and Enliang Li},
  year = {2017},
  doi = {10.1016/j.microrel.2017.03.003},
  url = {https://doi.org/10.1016/j.microrel.2017.03.003},
  researchr = {https://researchr.org/publication/ChenLL17-6},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {72},
  pages = {24-29},
}