Zhen-Yin Annie Chen, Chun-Cheng Lin, Ke-Wen Lu, Hui-Hsin Chin, Der-Jiunn Deng. An Improved Meta Learning Approach for Optimizing Recipe Parameters for Semiconductor Processes. In 49th Annual Conference of the IEEE Industrial Electronics Society, IECON 2023, Singapore, October 16-19, 2023. pages 1-2, IEEE, 2023. [doi]
Abstract is missing.