Lih-Shyang Chen, Young-Jinn Lay, Lian-Yong Lin, Jing-Jou Tang, Wen-Lin Cheng, Yu-Jen Lin. The 3D Display and Analysis of the Pattern of Photolithography. In Jeng-Shyang Pan, Shyi-Ming Chen, Ngoc Thanh Nguyen, editors, Computational Collective Intelligence. Technologies and Applications - Second International Conference, ICCCI 2010, Kaohsiung, Taiwan, November 10-12, 2010. Proceedings, Part I. Volume 6421 of Lecture Notes in Computer Science, pages 117-127, Springer, 2010. [doi]
@inproceedings{ChenLLTCL10,
title = {The 3D Display and Analysis of the Pattern of Photolithography},
author = {Lih-Shyang Chen and Young-Jinn Lay and Lian-Yong Lin and Jing-Jou Tang and Wen-Lin Cheng and Yu-Jen Lin},
year = {2010},
doi = {10.1007/978-3-642-16693-8_13},
url = {http://dx.doi.org/10.1007/978-3-642-16693-8_13},
tags = {analysis},
researchr = {https://researchr.org/publication/ChenLLTCL10},
cites = {0},
citedby = {0},
pages = {117-127},
booktitle = {Computational Collective Intelligence. Technologies and Applications - Second International Conference, ICCCI 2010, Kaohsiung, Taiwan, November 10-12, 2010. Proceedings, Part I},
editor = {Jeng-Shyang Pan and Shyi-Ming Chen and Ngoc Thanh Nguyen},
volume = {6421},
series = {Lecture Notes in Computer Science},
publisher = {Springer},
isbn = {978-3-642-16692-1},
}