Lih-Shyang Chen, Young-Jinn Lay, Lian-Yong Lin, Jing-Jou Tang, Wen-Lin Cheng, Yu-Jen Lin. The 3D Display and Analysis of the Pattern of Photolithography. In Jeng-Shyang Pan, Shyi-Ming Chen, Ngoc Thanh Nguyen, editors, Computational Collective Intelligence. Technologies and Applications - Second International Conference, ICCCI 2010, Kaohsiung, Taiwan, November 10-12, 2010. Proceedings, Part I. Volume 6421 of Lecture Notes in Computer Science, pages 117-127, Springer, 2010. [doi]
Abstract is missing.