Pin-Chuan Chen, Ya-ting Lin, Chi-Minh Truong, Pai-Shan Chen, Huihua Kenny Chiang. Development of an Automated Optical Inspection System for Rapidly and Precisely Measuring Dimensions of Embedded Microchannel Structures in Transparent Bonded Chips. Sensors, 21(3):698, 2021. [doi]
Abstract is missing.