A Fault Tolerance Mechanism for Semiconductor Equipment Monitoring

Shao-Jui Chen, Hsueh-Wen Liu, Wei-Jen Wang. A Fault Tolerance Mechanism for Semiconductor Equipment Monitoring. In 2017 IEEE 7th International Symposium on Cloud and Service Computing, SC² 2017, Kanazawa, Japan, November 22-25, 2017. pages 171-176, IEEE, 2017. [doi]

Authors

Shao-Jui Chen

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Hsueh-Wen Liu

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Wei-Jen Wang

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