Shao-Jui Chen, Hsueh-Wen Liu, Wei-Jen Wang. A Fault Tolerance Mechanism for Semiconductor Equipment Monitoring. In 2017 IEEE 7th International Symposium on Cloud and Service Computing, SC² 2017, Kanazawa, Japan, November 22-25, 2017. pages 171-176, IEEE, 2017. [doi]
Abstract is missing.