Ssu-Han Chen, Aron Michael, Chee Yee Kwok. A Fast Response MEMS Piezoelectric Microlens Actuator with Large Stroke and Low Driving Voltage. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 199-203, IEEE, 2018. [doi]
Abstract is missing.