Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry

Liang-Chia Chen, Xuan-Loc Nguyen, Hsin-Sing Huang, Jin-Liang Chen. Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry. IEEE Transactions on Industrial Electronics, 57(3):1120-1126, 2010. [doi]

Abstract

Abstract is missing.