Ye Chen, Jin Qian, Xinyan Guo, Yan Xing. An adaptive octree level set simulation method of the wet etching process for the fabrication of micro structure on sapphire crystal. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 882-886, IEEE, 2021. [doi]
Abstract is missing.