A Flexible Printed Circuit Board Based Microelectromechanical Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator

Tao Chen, Cyrus Shafai. A Flexible Printed Circuit Board Based Microelectromechanical Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator. Sensors, 24(2):439, January 2024. [doi]

Abstract

Abstract is missing.