Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications

Fred Chen, Matthew Spencer, Rhesa Nathanael, Chengcheng Wang, Hossein Fariborzi, Abhinav Gupta, Hei Kam, Vincent Pott, Jaeseok Jeon, Tsu-Jae King Liu, Dejan Markovic, Vladimir Stojanovic, Elad Alon. Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications. In IEEE International Solid-State Circuits Conference, ISSCC 2010, Digest of Technical Papers, San Francisco, CA, USA, 7-11 February, 2010. pages 150-151, IEEE, 2010. [doi]

Authors

Fred Chen

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Matthew Spencer

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Rhesa Nathanael

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Chengcheng Wang

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Hossein Fariborzi

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Abhinav Gupta

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Hei Kam

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Vincent Pott

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Jaeseok Jeon

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Tsu-Jae King Liu

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Dejan Markovic

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Vladimir Stojanovic

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Elad Alon

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