Fred Chen, Matthew Spencer, Rhesa Nathanael, Chengcheng Wang, Hossein Fariborzi, Abhinav Gupta, Hei Kam, Vincent Pott, Jaeseok Jeon, Tsu-Jae King Liu, Dejan Markovic, Vladimir Stojanovic, Elad Alon. Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications. In IEEE International Solid-State Circuits Conference, ISSCC 2010, Digest of Technical Papers, San Francisco, CA, USA, 7-11 February, 2010. pages 150-151, IEEE, 2010. [doi]
Abstract is missing.