Xin Chen, Daqiao Tong, Jian Zhang, Lingxiao Gao, Fayang Wang, Hongzhi Pan, Liang Cao, Xiaojing Mu. Broadband Piezoelectric Harvester Utilizing Three-wafer Bonding for Self-powered Wireless Sensor System. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 158-161, IEEE, 2021. [doi]
Abstract is missing.