Ruey-Shun Chen, Ruey-Chyi Wu, Chan-Chine Chang. Using Data Mining Technology to Design an Intelligent CIM System for IC Manufacturing. In Lawrence Chung, Yeong-Tae Song, editors, Proceedings of the 6th ACIS International Conference on Software Engineering, Artificial Intelligence, Networking and Parallel/Distributed Computing (SNPD 2005), May 23-25, 2005, Towson, Maryland, USA. pages 70-75, IEEE Computer Society, 2005. [doi]
Abstract is missing.