The experimental analysis and the mechanical model for the debonding failure of TSV-Cu/Si interface

Si Chen, Zhizhe Wang, Yunfei En, Yun Huang, Fei Qin, Tong An. The experimental analysis and the mechanical model for the debonding failure of TSV-Cu/Si interface. Microelectronics Reliability, 91:52-66, 2018. [doi]

@article{ChenWEHQA18,
  title = {The experimental analysis and the mechanical model for the debonding failure of TSV-Cu/Si interface},
  author = {Si Chen and Zhizhe Wang and Yunfei En and Yun Huang and Fei Qin and Tong An},
  year = {2018},
  doi = {10.1016/j.microrel.2018.08.005},
  url = {https://doi.org/10.1016/j.microrel.2018.08.005},
  researchr = {https://researchr.org/publication/ChenWEHQA18},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {91},
  pages = {52-66},
}