The experimental analysis and the mechanical model for the debonding failure of TSV-Cu/Si interface

Si Chen, Zhizhe Wang, Yunfei En, Yun Huang, Fei Qin, Tong An. The experimental analysis and the mechanical model for the debonding failure of TSV-Cu/Si interface. Microelectronics Reliability, 91:52-66, 2018. [doi]

Abstract

Abstract is missing.