Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor

Tao Chen, Yaqiong Wang, Huicong Liu, Zhan Yang, Pengbo Wang, Lining Sun. Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor. Sensors, 17(2):257, 2017. [doi]

Abstract

Abstract is missing.