Design and modeling of an electromagnetically excited silicon nitride beam resonant pressure sensor - researchr publication authors

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Deyong Chen, Zhengwei Wu, Xiaojing Shi, Junbo Wang, Lei Liu. Design and modeling of an electromagnetically excited silicon nitride beam resonant pressure sensor. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 754-757, IEEE, 2009. [doi]

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