Adaptive control for micro/nano positioning system driven by piezo electric actuator

Xinkai Chen, Shengjun Wen, Dongyun Wang, Chun-Yi Su. Adaptive control for micro/nano positioning system driven by piezo electric actuator. In 24th IEEE International Symposium on Industrial Electronics, ISIE 2015, Rio de Janeiro, Brazil, June 3-5, 2015. pages 66-71, IEEE, 2015. [doi]

@inproceedings{ChenWWS15,
  title = {Adaptive control for micro/nano positioning system driven by piezo electric actuator},
  author = {Xinkai Chen and Shengjun Wen and Dongyun Wang and Chun-Yi Su},
  year = {2015},
  doi = {10.1109/ISIE.2015.7281445},
  url = {https://doi.org/10.1109/ISIE.2015.7281445},
  researchr = {https://researchr.org/publication/ChenWWS15},
  cites = {0},
  citedby = {0},
  pages = {66-71},
  booktitle = {24th IEEE International Symposium on Industrial Electronics, ISIE 2015, Rio de Janeiro, Brazil, June 3-5, 2015},
  publisher = {IEEE},
}