Adaptive control for micro/nano positioning system driven by piezo electric actuator

Xinkai Chen, Shengjun Wen, Dongyun Wang, Chun-Yi Su. Adaptive control for micro/nano positioning system driven by piezo electric actuator. In 24th IEEE International Symposium on Industrial Electronics, ISIE 2015, Rio de Janeiro, Brazil, June 3-5, 2015. pages 66-71, IEEE, 2015. [doi]

Abstract

Abstract is missing.