Hao Chen, Xinjie Wang, Zhanwen Xi, Jiong Wang, Weirong Nie. Optical Measurement of the Dynamic Response of an Electrothermal Microactuator. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1358-1361, IEEE, 2021. [doi]
Abstract is missing.