Multivariate Simulation Assessment for Virtual Metrology

Yeh-Tung Chen, Haw Ching Yang, Fan-Tien Cheng. Multivariate Simulation Assessment for Virtual Metrology. In Proceedings of the 2006 IEEE International Conference on Robotics and Automation, ICRA 2006, May 15-19, 2006, Orlando, Florida, USA. pages 1048-1053, IEEE, 2006.

@inproceedings{ChenYC06,
  title = {Multivariate Simulation Assessment for Virtual Metrology},
  author = {Yeh-Tung Chen and Haw Ching Yang and Fan-Tien Cheng},
  year = {2006},
  researchr = {https://researchr.org/publication/ChenYC06},
  cites = {0},
  citedby = {0},
  pages = {1048-1053},
  booktitle = {Proceedings of the 2006 IEEE International Conference on Robotics and Automation, ICRA 2006, May 15-19, 2006, Orlando, Florida, USA},
  publisher = {IEEE},
}