Dian-Sheng Chen, Po-Fan Yeh, Yu-Fan Chen, Chun-Wei Tsai, Chun-Yi Yin, Ren-Jie Lai, Jui-che Tsai. An Electrothermal Actuator With Two Degrees of Freedom Serving as the Arm of a MEMS Gripper. IEEE Transactions on Industrial Electronics, 61(10):5465-5471, 2014. [doi]
Abstract is missing.