Muyu Chen, Huijun Yu, Shuai Guo, Run Xu, Wenjiang Shen. An electromagnetically-driven MEMS micromirror for laser projection. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 605-607, IEEE, 2015. [doi]
Abstract is missing.