Fan-Tien Cheng, Meng-Tsang Lin, Rong-Shean Lee. Developing a Web-Enabled Equipment Driver for Semiconductor Equipment Communications. In Proceedings of the 2000 IEEE International Conference on Robotics and Automation, ICRA 2000, April 24-28, 2000, San Francisco, CA, USA. pages 2203-2210, IEEE, 2000.
@inproceedings{ChengLL00,
title = {Developing a Web-Enabled Equipment Driver for Semiconductor Equipment Communications},
author = {Fan-Tien Cheng and Meng-Tsang Lin and Rong-Shean Lee},
year = {2000},
researchr = {https://researchr.org/publication/ChengLL00},
cites = {0},
citedby = {0},
pages = {2203-2210},
booktitle = {Proceedings of the 2000 IEEE International Conference on Robotics and Automation, ICRA 2000, April 24-28, 2000, San Francisco, CA, USA},
publisher = {IEEE},
isbn = {0-7803-5889-9},
}