Chao Cheng, Yadong Li, Yulan Lu, Chao Xiang, Jian Chen, Junbo Wang, Deyong Chen. A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 193-196, IEEE, 2021. [doi]
@inproceedings{ChengLLXCWC21,
title = {A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology},
author = {Chao Cheng and Yadong Li and Yulan Lu and Chao Xiang and Jian Chen and Junbo Wang and Deyong Chen},
year = {2021},
doi = {10.1109/NEMS51815.2021.9451493},
url = {https://doi.org/10.1109/NEMS51815.2021.9451493},
researchr = {https://researchr.org/publication/ChengLLXCWC21},
cites = {0},
citedby = {0},
pages = {193-196},
booktitle = {16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021},
publisher = {IEEE},
isbn = {978-1-6654-1941-3},
}