Chao Cheng, Yadong Li, Yulan Lu, Chao Xiang, Jian Chen, Junbo Wang, Deyong Chen. A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 193-196, IEEE, 2021. [doi]
Abstract is missing.