Chao-Yu Cheng, Yan-Bo Lin, Kerwin Wang. Using a canny-edge-detection based method to characterize in-plane micro-actuators. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 729-732, IEEE, 2012. [doi]
Abstract is missing.