Achieving the Defect Transfer Detection of Semiconductor Wafer by a Novel Prototype Learning-Based Semantic Segmentation Network - researchr publication

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Jiangtao Cheng, Guojun Wen, Xin He, Xingyue Liu, Yang Hu, Shuang Mei. Achieving the Defect Transfer Detection of Semiconductor Wafer by a Novel Prototype Learning-Based Semantic Segmentation Network. IEEE T. Instrumentation and Measurement, 73:1-12, 2024. [doi]

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