Modeling and analysis of equipment managers in manufacturing execution systems for semiconductor packaging

Fan-Tien Cheng, Haw Ching Yang, Tsung-Liang Luo, Chengche Feng, MuDer Jeng. Modeling and analysis of equipment managers in manufacturing execution systems for semiconductor packaging. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 30(5):772-782, 2000.

Abstract

Abstract is missing.